Magnetron Sputtering
Metal atoms are bombarded with energetic ions of argon, then deposited on the substrate material forming a metallic film.
IAD
Under the effect of electron gun, part of the film material gains high temperature, vaporizes and deposits on the surface of substrate, then form condense film with the bombardment of auxiliary ion source
IBS
Molecules or atoms on the target surface are bombarded with high-speed positive ions thus gain enough energy to overflow and deposit on the surface of the substrate
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